ZHANG Zhongshan;LI Yao;YANG Haifang;ZHAO Xuan;CAI Hua;

• 1:Micro/nano fabrication laboratory
• 2: Beijing National Laboratory for Condensed Matter Physics
• 3: Institute of Physics
• 4:Chinese Academy of Sciences

Abstract：

The microchannel plate(MCP) is a two-dimensional continuous electron multiplier vacuum device that exhibits certain quantum detection efficiency for most charged particles, some high-energy particles, and short-wavelength light. As a result, it is widely used in fields such as low-light-level night-vision, aerospace detection, nuclear detection, and large-scale scientific instruments. Microchannel plate is the key core component of domestic high-end scientific instruments, as well as the key basic materials of national major projects, strategic emerging industries and national defense construction, and its material and manufacturing optimization and high performance are international research and development hotspots. The gain is an important performance characteristic for microchannel plates. The increasing in gain can improves the signal-to-noise ratio or detection efficiency. Traditional microchannel plates exhibit a gain of 2000～4000 at a test voltage of 800V, whereas the ion-beam-etched funnel microchannel plate presented in this study achieves a gain of 6020 under the same conditions. So, the research in this paper provide new opportunities to improve the quality of China's high-end instruments and get rid of the status stuck neck of key components being subject to people for a long time.

Key Words： microchannel plate;quantum detection efficiency;funneled microchannel plate;ion beam etching

Abstract:

Keywords:

Foundation: 国家重点研发计划资助（2022YFF0709300）

Authors: ZHANG Zhongshan;LI Yao;YANG Haifang;ZHAO Xuan;CAI Hua;

References：

• [1]ZHU X P. High-performance Microchannel Plates Based on Functional Nano Films Design and Performance Modulation[J]. University of Chinese Academy of Sciences, 2023.
• [2]SUN Z W, HUANG Y G, JIA J S, et al. Effect of acid etching on electrical performances of microchannel plate[J].Journal of Applied Optics, 2008, 29(2):5.
• [3]KULOV S K, KARMOKOV A M, MOLOKANOV O A.Nanoscale inhomogeneities on the microchannel plate lead silicate glass surface[J]. Bulletin of the Russian Academy of Sciences:Physics, 2009, 73(11):1549-1551.
• [4]CARPENTER J D, FRASER G W, BANNISTER N P, et al. An analysis of microchannel plate composition and its effect on extreme ultraviolet quantum efficiency[J]. Nuclear Instruments and Methods in Physics Research A, 2007,573:232-235.
• [5]TICK T, CAMPBELL M, MICHEL T, et al. Status of the Timepix MCP-HPD development[J]. Journal of Instrumentation, 2010, 5(12):C12020.
• [6]UCHICAGO ARGONNE, LLC; Patent Issued for Systems and Methods for Forming Microchannel Plate(MCP)Photodetector Assemblies(USPTO 9704900)[J]. Journal of Engineering, 2017.
• [7]KOMAREK T, URBá?EK V, BRANDT A, et al. Timing resolution and rate capability of Photonis mini Palnacon XPM85212/A1-S MCP-PMT[J]. Nuclear Instruments and Methods in Physics Research Section A:Accelerators,Spectrometers, Detectors and Associated Equipment, 2021,985:164705.
• [8]QIU X B, MIN X J, JIN G, et al. Theoretical model of funnel microchannel plate fabricated through dry etching[J].Infrared Technology, 2022, 4(8):818-823.